Semicera Silicon Wafers yakozwe muburyo bwitondewe kugirango ibe umusingi wibikoresho byinshi bya semiconductor, kuva microprocessor kugeza selile selile. Izi waferi zikoreshejwe neza kandi zifite isuku, zitanga imikorere myiza mubikorwa bitandukanye bya elegitoroniki.
Yakozwe hifashishijwe tekinoroji igezweho, Semicera Silicon Wafers yerekana uburinganire budasanzwe nuburinganire, nibyingenzi kugirango umuntu agere ku musaruro mwinshi muguhimba igice cya kabiri. Uru rwego rwukuri rufasha mukugabanya inenge no kuzamura imikorere rusange yibikoresho bya elegitoroniki.
Ubwiza buhebuje bwa Semicera Silicon Wafers bugaragarira mubiranga amashanyarazi, bigira uruhare mukuzamura imikorere yibikoresho bya semiconductor. Hamwe numwanda muke hamwe nubwiza bwo hejuru bwa kirisiti, iyi wafer itanga urubuga rwiza rwo guteza imbere ibikoresho bya elegitoroniki.
Kuboneka mubunini butandukanye kandi bwihariye, Semicera Silicon Wafers irashobora guhuzwa kugirango ihuze ibyifuzo byinganda zitandukanye, harimo kubara, itumanaho, ningufu zishobora kubaho. Haba kubikorwa binini binini cyangwa ubushakashatsi bwihariye, aba wafer batanga ibisubizo byizewe.
Semicera yiyemeje gushyigikira iterambere no guhanga udushya mu nganda ziciriritse zitanga wafer nziza yo mu rwego rwo hejuru yujuje ubuziranenge bw’inganda. Hamwe no kwibanda ku busobanuro no kwizerwa, Semicera ituma abayikora basunika imipaka yikoranabuhanga, bakemeza ko ibicuruzwa byabo biguma kumwanya wambere ku isoko.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
