Semicera's SiN Ceramics Plain Substrates itanga igisubizo cyiza cyane kubikorwa bitandukanye bya elegitoroniki ninganda. Azwiho ubwiza bwumuriro nububasha bukomeye, izi substrate zitanga imikorere yizewe mubidukikije.
Ceramics yacu ya SiN (Silicon Nitride) yagenewe guhangana nubushyuhe bukabije nubushyuhe bukabije, bigatuma bikenerwa na electronics zifite ingufu nyinshi hamwe nibikoresho bigezweho bya semiconductor. Kuramba kwabo no kurwanya ihungabana ryumuriro bituma bakora neza mugukoresha aho kwizerwa no gukora ari ngombwa.
Semicera itunganijwe neza yerekana neza ko buri substrate isanzwe yujuje ubuziranenge bukomeye. Ibi bivamo substrates hamwe nubunini buhoraho hamwe nubuziranenge bwubuso, nibyingenzi kugirango ugere kumikorere myiza mumateraniro ya elegitoronike na sisitemu.
Usibye ibyiza byubushyuhe nubukanishi, SiN Ceramics Plain Substrates itanga ibikoresho byiza byamashanyarazi. Ibi byemeza amashanyarazi make kandi bikagira uruhare muri rusange gutekana no gukora neza ibikoresho bya elegitoroniki, bizamura ubuzima bwabo.
Muguhitamo Semicera's SiN Ceramics Plain Substrates, uhitamo ibicuruzwa bihuza siyanse yubumenyi bugezweho hamwe ninganda zo hejuru. Ibyo twiyemeje gukora ubuziranenge no guhanga udushya byemeza ko wakiriye insimburangingo zujuje ubuziranenge bw’inganda kandi zigashyigikira intsinzi yimishinga yawe yiterambere.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
