SOI Wafer Silicon Kuri Insulator

Ibisobanuro bigufi:

SOI Wafer ya Semicera (Silicon On Insulator) itanga amashanyarazi adasanzwe hamwe nibikorwa bya semiconductor yateye imbere. Yakozwe muburyo bwiza bwo gukoresha amashanyarazi nu mashanyarazi, iyi wafer nibyiza kumikorere-yimikorere ihuriweho cyane. Hitamo Semicera kubwiza no kwizerwa muri tekinoroji ya wafer.


Ibicuruzwa birambuye

Ibicuruzwa

SOI Wafer ya Semicera (Silicon On Insulator) yashizweho kugirango itange amashanyarazi akomeye hamwe nubushyuhe bwumuriro. Ubu buryo bushya bwa wafer, bugaragaza urwego rwa silikoni kurwego rwiziritse, rwemeza imikorere yibikoresho kandi bikagabanya gukoresha ingufu, bigatuma biba byiza muburyo butandukanye bwo gukoresha tekinoroji.

Wafers yacu ya SOI itanga inyungu zidasanzwe kumuzunguruko uhuriweho kugabanya ubushobozi bwa parasitike no kuzamura umuvuduko wibikoresho no gukora neza. Ibi ni ingenzi cyane kuri elegitoroniki igezweho, aho imikorere nini ningufu zingirakamaro ari ngombwa kubakoresha no mu nganda.

Semicera ikoresha ubuhanga buhanitse bwo gukora kugirango ikore SOI wafers ifite ireme kandi yizewe. Iyi wafer itanga ubushyuhe bwiza bwumuriro, bigatuma ikoreshwa neza mubidukikije aho gukwirakwiza ubushyuhe biteye impungenge, nko mubikoresho bya elegitoroniki byumuvuduko mwinshi hamwe na sisitemu yo gucunga ingufu.

Gukoresha waI wafer ya SOI muguhimba igice cya semiconductor ituma habaho iterambere ryoroheje, ryihuta, kandi ryizewe. Ubwitange bwa Semicera mubikorwa byubwubatsi buteganya neza ko wafer yacu ya SOI yujuje ubuziranenge bwo hejuru bukenewe mu ikoranabuhanga rigezweho mu bijyanye n’itumanaho, ibinyabiziga, hamwe n’ibikoresho bya elegitoroniki.

Guhitamo SOI Wafer ya Semicera bisobanura gushora imari mubicuruzwa bifasha iterambere ryikoranabuhanga rya elegitoroniki na mikorobe. Wafers yacu yashizweho kugirango itange imikorere irambye kandi iramba, igira uruhare mugutsinda kwimishinga yawe yubuhanga buhanitse kandi ikemeza ko uguma kumwanya wambere wo guhanga udushya.

Ibintu

Umusaruro

Ubushakashatsi

Dummy

Ibipimo bya Crystal

Polytype

4H

Ikosa ryerekana icyerekezo

<11-20> 4 ± 0.15 °

Ibipimo by'amashanyarazi

Dopant

Ubwoko bwa Azote

Kurwanya

0.015-0.025ohm · cm

Ibipimo bya mashini

Diameter

150.0 ± 0.2mm

Umubyimba

350 ± 25 mm

Icyerekezo cyibanze

[1-100] ± 5 °

Uburebure bwibanze

47.5 ± 1.5mm

Igice cya kabiri

Nta na kimwe

TTV

≤5 mm

≤10 mm

≤15 mm

LTV

≤3 μm (5mm * 5mm)

≤5 μm (5mm * 5mm)

≤10 μ m (5mm * 5mm)

Umuheto

-15 mm ~ 15 mm

-35μm ~ 35μm

-45μm ~ 45μm

Intambara

≤35 mm

≤45 mm

≤55 mm

Imbere (Si-face) ubukana (AFM)

Ra≤0.2nm (5μm * 5μm)

Imiterere

Ubucucike bwa Micropipe

<1 ea / cm2

<10 ea / cm2

<15 ea / cm2

Umwanda

≤5E10atoms / cm2

NA

BPD

≤1500 ea / cm2

0003000 ea / cm2

NA

TSD

≤500 ea / cm2

0001000 ea / cm2

NA

Ubwiza bw'imbere

Imbere

Si

Kurangiza

Si-face CMP

Ibice

≤60ea / wafer (ubunini≥0.3μm)

NA

Igishushanyo

≤5ea / mm. Uburebure bwuzuye ≤Ibipimo

Uburebure bwuzuye≤2 * Diameter

NA

Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza

Nta na kimwe

NA

Imipira yimpande / ibyerekana / kuvunika / isahani

Nta na kimwe

Agace ka polytype

Nta na kimwe

Agace kegeranye ≤20%

Agace kegeranye ≤30%

Ikimenyetso cya laser imbere

Nta na kimwe

Inyuma Yinyuma

Kurangiza

C-isura CMP

Igishushanyo

≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter

NA

Inenge zinyuma (chips / indents)

Nta na kimwe

Inyuma yinyuma

Ra≤0.2nm (5μm * 5μm)

Ikimenyetso cya laser inyuma

Mm 1 (uhereye hejuru)

Impande

Impande

Chamfer

Gupakira

Gupakira

Epi-yiteguye hamwe no gupakira vacuum

Gupakira cassette nyinshi

* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD.

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SiC wafers

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