SOI Wafer ya Semicera (Silicon On Insulator) yashizweho kugirango itange amashanyarazi akomeye hamwe nubushyuhe bwumuriro. Ubu buryo bushya bwa wafer, bugaragaza urwego rwa silikoni kurwego rwiziritse, rwemeza imikorere yibikoresho kandi bikagabanya gukoresha ingufu, bigatuma biba byiza muburyo butandukanye bwo gukoresha tekinoroji.
Wafers yacu ya SOI itanga inyungu zidasanzwe kumuzunguruko uhuriweho kugabanya ubushobozi bwa parasitike no kuzamura umuvuduko wibikoresho no gukora neza. Ibi ni ingenzi cyane kuri elegitoroniki igezweho, aho imikorere nini ningufu zingirakamaro ari ngombwa kubakoresha no mu nganda.
Semicera ikoresha ubuhanga buhanitse bwo gukora kugirango ikore SOI wafers ifite ireme kandi yizewe. Iyi wafer itanga ubushyuhe bwiza bwumuriro, bigatuma ikoreshwa neza mubidukikije aho gukwirakwiza ubushyuhe biteye impungenge, nko mubikoresho bya elegitoroniki byumuvuduko mwinshi hamwe na sisitemu yo gucunga ingufu.
Gukoresha waI wafer ya SOI muguhimba igice cya semiconductor ituma habaho iterambere ryoroheje, ryihuta, kandi ryizewe. Ubwitange bwa Semicera mubikorwa byubwubatsi buteganya neza ko wafer yacu ya SOI yujuje ubuziranenge bwo hejuru bukenewe mu ikoranabuhanga rigezweho mu bijyanye n’itumanaho, ibinyabiziga, hamwe n’ibikoresho bya elegitoroniki.
Guhitamo SOI Wafer ya Semicera bisobanura gushora imari mubicuruzwa bifasha iterambere ryikoranabuhanga rya elegitoroniki na mikorobe. Wafers yacu yashizweho kugirango itange imikorere irambye kandi iramba, igira uruhare mugutsinda kwimishinga yawe yubuhanga buhanitse kandi ikemeza ko uguma kumwanya wambere wo guhanga udushya.
Ibintu | Umusaruro | Ubushakashatsi | Dummy |
Ibipimo bya Crystal | |||
Polytype | 4H | ||
Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
Ibipimo by'amashanyarazi | |||
Dopant | Ubwoko bwa Azote | ||
Kurwanya | 0.015-0.025ohm · cm | ||
Ibipimo bya mashini | |||
Diameter | 150.0 ± 0.2mm | ||
Umubyimba | 350 ± 25 mm | ||
Icyerekezo cyibanze | [1-100] ± 5 ° | ||
Uburebure bwibanze | 47.5 ± 1.5mm | ||
Igice cya kabiri | Nta na kimwe | ||
TTV | ≤5 mm | ≤10 mm | ≤15 mm |
LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
Imiterere | |||
Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
Umwanda | ≤5E10atoms / cm2 | NA | |
BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
Ubwiza bw'imbere | |||
Imbere | Si | ||
Kurangiza | Si-face CMP | ||
Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
Ikimenyetso cya laser imbere | Nta na kimwe | ||
Inyuma Yinyuma | |||
Kurangiza | C-isura CMP | ||
Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
Inenge zinyuma (chips / indents) | Nta na kimwe | ||
Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
Impande | |||
Impande | Chamfer | ||
Gupakira | |||
Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. |