TaC yatwikiriye epitaxial wafer itwaramubisanzwe bikoreshwa mugutegura ibikoresho-byiza bya optoelectronic ibikoresho, ibikoresho byamashanyarazi, sensor nizindi nzego. Ibiepitaxial wafer itwarabivuga kubitsaTaCfirime yoroheje kuri substrate mugihe cyo gukura kwa kristu kugirango ikore wafer ifite imiterere nimikorere yihariye yo gutegura ibikoresho.
Ububiko bwa chimique de chimique (CVD) mubusanzwe bukoreshwa muguteguraTaC yatwikiriye epitaxial wafer itwara. Mugukoresha ibyuma byabanjirije ibyuma na gaze ya karubone mubushyuhe bwinshi, firime ya TaC irashobora kubikwa hejuru yubutaka bwa kristu. Iyi firime irashobora kugira amashanyarazi meza, optique na mashini kandi irakwiriye mugutegura ibikoresho bitandukanye bikora neza.
Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Nyuma yimyaka yiterambere, Semicera yatsinze ikoranabuhanga ryaCVD TaCn'imbaraga zihuriweho n'ishami R&D. Inenge ziroroshye kugaragara mugikorwa cyo gukura kwa waC waferi, ariko nyuma yo kuyikoreshaTaC, itandukaniro ni ngombwa. Hasi ni igereranya rya wafers hamwe na TaC, kimwe na Simicera ibice byo gukura kwa kristu imwe.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hari ingero zimwe zintangarugero:
