TaC yashushanyije igishushanyo mbonera cyerekana impetaohereza kubitsa urwego ruto rwatantalum karbidehejuru yubushakashatsi bwa grafite kugirango butezimbere imyambarire, ubushyuhe bwo hejuru hamwe n’imiti ihamye. Ubusanzwe iyi shitingi ikorwa hejuru yubushakashatsi bwa grafite ikoresheje tekinoroji nko guhumeka imyuka yumubiri (PVD) cyangwa imyuka ya chimique (CVD).
Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Nyuma yimyaka yiterambere, Semicera yatsinze ikoranabuhanga ryaCVD TaCn'imbaraga zihuriweho n'ishami R&D. Inenge ziroroshye kugaragara mugikorwa cyo gukura kwa waC waferi, ariko nyuma yo kuyikoreshaTaC, itandukaniro ni ngombwa. Hasi ni igereranya rya wafers hamwe na TaC, kimwe na Simicera ibice byo gukura kwa kristu imwe.
Ibintu nyamukuru biranga TaC yashushanyijeho impeta yerekana impeta zirimo:
1. Kurwanya ubushyuhe bwo hejuru: TaC itwikiriye ifite ubushyuhe buhebuje kandi irashobora gukomeza guhagarara neza mubushyuhe bwo hejuru.
2. Kwambara birwanya: Ubukomezi bukabije bwa tantalum karbide yoroheje itanga impeta iyobora impeta nziza kandi ikongerera igihe cyakazi.
3. Ihungabana ryimiti: Igikoresho cya TaC gifite umutekano muke mukurwanya ruswa, bigatuma gikoreshwa mubitangazamakuru bimwe byangirika.
4. Kugabanya ubushyamirane: Ipfundikizo ya TaC irashobora kugabanya neza guterana hagati yimpeta ya grafite iyobora nibindi bice kandi ikanoza imikorere ya kashe ya mashini.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hari ingero zimwe zintangarugero:
