Semicera yishimiye kumenyekanishaTaC Yashizweho Wafer Susceptor, ikozwe muburyo bwihariye kugirango ihuze ibyifuzo byubushyuhe bwo hejuru, ikoresheje uburyo bushya bwo gutwikira CVD kugirango itange ibintu byiza bya Tantalum Carbide. Wafer Susceptor yacu ikora neza mubushyuhe bwo hejuru hamwe nikirere cyangirika, ikerekana ubudahangarwa bwimiti nubushyuhe bwumuriro, bigatuma imikorere yizewe mubidukikije bikabije.
Iyi Wafer Susceptor ikoresha ubuziranengeIgikoresho cya TaC, ntabwo iteza imbere cyane kurwanya imyambarire, ariko kandi irwanya neza kwangirika kwimiti, itanga ubuzima burambye. Haba muri epitaxy ya silicon, gukura cyangwa izindi porogaramu zikoresha igice, Semicera ya TaC Coated Wafer Susceptor irashobora guha abakoresha imikorere ihamye kandi itunganijwe neza.
Semicera yamye yiyemeje guha abakiriya ibikoresho nibikoresho byikoranabuhanga. IwacuTaC Yashizweho Wafer Susceptorikora igenzura rikomeye mugihe cyo gushushanya no gukora kugirango buri gicuruzwa cyujuje ubuziranenge. Turakomeza kunonosora ibintu hamwe nibikorwa kugirango dufashe abakiriya kugera ku musaruro mwinshi no ku bwiza bwibicuruzwa mu nganda zikora neza.
Iyo uhisemo SemiceraTaC Coating Wafer Susceptor, ubona ibicuruzwa bisumba byose byerekana imikorere idasanzwe mubushyuhe bwo hejuru hamwe nibidukikije byangirika, bifasha ibikorwa byawe byinganda kugera ahirengeye.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
