Igikoresho cya TaCni ikintu cyingenzi gifatika, gisanzwe gitegurwa kuri grafite hifashishijwe icyuma kama kama kama kama (MOCVD). Iyi kote ifite ibintu byiza cyane, nkubukomere bukabije, kwihanganira kwambara neza, kurwanya ubushyuhe bwinshi hamwe n’imiti ihamye, kandi birakwiriye mubikorwa bitandukanye byubwubatsi bukenewe cyane.
Ikoranabuhanga rya MOCVD nubuhanga bukoreshwa muburyo bwo gukura bwa firime yoroheje ishyira firime yifuzwa hejuru yubutaka hifashishijwe ibyuma byabanjirije ibyuma hamwe na gaze yubushyuhe bukabije. Mugihe witeguraIgikoresho cya TaC, guhitamo icyuma gikwiye kibanziriza isoko hamwe na karubone, kugenzura imiterere yimyitwarire hamwe nibipimo byoherejwe, firime imwe kandi yuzuye ya TaC irashobora kubikwa kuri base ya grafite.
Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Nyuma yimyaka yiterambere, Semicera yatsinze ikoranabuhanga ryaCVD TaCn'imbaraga zihuriweho n'ishami R&D. Inenge ziroroshye kugaragara mugikorwa cyo gukura kwa waC waferi, ariko nyuma yo kuyikoreshaTaC, itandukaniro ni ngombwa. Hasi ni igereranya rya wafers hamwe na TaC, kimwe na Simicera ibice byo gukura kwa kristu imwe.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hariburorero bumwebumwe bwintangarugero:
