TaC Coated Plate ni disiki yihariye yagenewe gukoreshwa mubikorwa bya epitaxial ya SiC, ikozwe neza neza neza nibikoresho byiza bya grafite. Ubuso bwacyo busizwe neza na karbide ya tantalum (TaC), uruganda ruzwiho ubuziranenge n'imbaraga zidasanzwe. Igifuniko cya TaC cyongerera isahani kuramba no guhangana nubushyuhe bwo hejuru, bigatuma biba byiza mubihe bikenewe byimikorere ya epitaxial ya SiC.
Ubu buryo bushya bwa TaC Coated Plate ni disiki yihariye yagenewe gukoreshwa mubikorwa bya epitaxial ya SiC, ikozwe neza na neza kuva mubikoresho byiza bya grafite. Ubuso bwa TaC bushyizweho isahani yuzuye neza na karbide ya tantalum (TaC), uruganda ruzwiho ubuziranenge n'imbaraga zidasanzwe. ikora nk'urubuga rwizewe rwo gutwara wafer mugihe cyinyuranye cyo gukura kwa epitaxial SiC. Igicapo cyacyo cyiza cyane gitanga ubuso butajegajega kandi butagira inert, mugihe TaC itwikiriye yongeyeho urwego rwokwirinda imiti yimiti no kwambara.
SemicibiheIsahani ya TaC yatunganijwe ikurikije ibisabwa byihariye byabakiriya, itanga imikorere myiza kandi ihuza na sisitemu ya epitaxial ya SiC. Yaba ingano, imiterere, cyangwa ibindi bisobanuro, aya masahani arahujwe kugirango akemure ibyifuzo byihariye bya buri porogaramu.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hariburorero bumwebumwe bwintangarugero:
