Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Tantalum karbide yatwikiriwe na wafer ikoreshwa cyane mugutunganya wafer no gutunganya uburyo bwo gukora semiconductor. Zitanga inkunga ihamye nuburinzi kugirango umutekano, ubunyangamugayo nuburinganire bwa wafer mugihe cyo gukora. Tantalum carbide coatings irashobora kongera igihe cyumurimo wuwitwaye, kugabanya ibiciro, no kuzamura ubwiza nubwizerwe bwibicuruzwa bitwara imashanyarazi.
Ibisobanuro bya tantalum karbide isize wafer itwara ni ibi bikurikira:
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. Iyi coating irashobora gutanga uburinzi bwinyongera no kwambara, mugihe ifite ubushyuhe bwiza.
3. Uburinganire n'ubwuzuzanye: Tantalum karbide itwikiriwe na wafer ifite urwego rwo hejuru ruringaniye kandi rusobanutse neza, rwemeza neza ko wafer ihagaze neza mugihe cyo gukora. Kuringaniza no kurangiza hejuru yabatwara ni ngombwa kugirango hamenyekane ubuziranenge n'imikorere ya wafer.
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hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hariburorero bumwebumwe bwintangarugero:
