Tantalum karbide yometseho urupapuroni igishushanyo mbonera gifite urwego ruto rwatantalum karbidehejuru ya substrate. Ubunini bwa karbide ya tantalum isanzwe ikorwa hejuru yubutaka bwa grafite hakoreshejwe tekinoroji nko kubika imyuka yumubiri (PVD) cyangwa kubika imyuka ya chimique (CVD). Iyi kote ifite ibintu byiza cyane nko gukomera cyane, kurwanya kwambara neza, kurwanya ruswa no guhagarara neza.
Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Nyuma yimyaka yiterambere, Semicera yatsinze ikoranabuhanga ryaCVD TaCn'imbaraga zihuriweho n'ishami R&D. Inenge ziroroshye kugaragara mugikorwa cyo gukura kwa waC waferi, ariko nyuma yo kuyikoreshaTaC, itandukaniro ni ngombwa. Hasi ni igereranya rya wafers hamwe na TaC, kimwe na Simicera ibice byo gukura kwa kristu imwe.
Ibyiza byingenzi bya tantalum karbide yometseho urupapuro rwa grafite harimo:
1. Kurwanya ubushyuhe bwinshi: Carbide ya Tantalum ifite aho ishonga cyane hamwe nubushyuhe buhebuje bwo hejuru, bigatuma urupapuro rwerekana ishusho rukwiriye gukoreshwa mubushyuhe bwo hejuru.
2. Kurwanya ruswa: Gutwika karbide ya Tantalum birashobora kurwanya isuri yibintu byinshi byangiza imiti kandi bikongerera igihe cyo gukora ibikoresho.
3. Ubukomere bukabije: Ubukomere bukabije bwa tantalum karbide yoroheje itanga uburyo bwiza bwo kwambara kandi burakwiriye mubisabwa bisaba kwihanganira kwambara cyane.
4. Ihungabana ryimiti: Tantalum karbide itwikiriye ifite ituze ryiza ryangirika ryimiti kandi irakwiriye gukoreshwa mubitangazamakuru bimwe byangirika.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hari ingero zimwe zintangarugero:
