Tantalum karbide yometseho plaque ya susceptorni suseptor cyangwa inkunga yuburyo butwikiriwe nigice gito cyatantalum karbide. Ipitingi irashobora gushingwa hejuru ya susceptor hakoreshejwe tekinoroji nko kubika imyuka yumubiri (PVD) cyangwa imyuka ya chimique (CVD), igaha susceptor ibintu byiza byatantalum karbide.
Semicera itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara.Semicera iyobora uburyo bwo gutwika ifasha tantalum karbide (TaC) kugirango igere ku isuku ryinshi, ihindagurika ryubushyuhe bwinshi no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI (Graphite yatwikiriye TaC susceptor), no kwagura ubuzima bwibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi Semicera imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.
Nyuma yimyaka yiterambere, Semicera yatsinze ikoranabuhanga ryaCVD TaCn'imbaraga zihuriweho n'ishami R&D. Inenge ziroroshye kugaragara mugikorwa cyo gukura kwa waC waferi, ariko nyuma yo kuyikoreshaTaC, itandukaniro ni ngombwa. Hasi ni igereranya rya wafers hamwe na TaC, kimwe na Simicera ibice byo gukura kwa kristu imwe.
Ibintu nyamukuru biranga tantalum karbide yometseho ibyapa bifasha harimo:
1. Ubushyuhe bwo hejuru: Carbide ya Tantalum ifite ubushyuhe buhebuje bwo hejuru, bigatuma isahani yifatizo isobekeranye ikwiranye nubufasha bukenewe mubushyuhe bwo hejuru.
2. Kurwanya ruswa: Ipitingi ya karubide ya Tantalum ifite imbaraga zo kurwanya ruswa, irashobora kurwanya imiti yangiza na okiside, kandi ikongerera igihe cyo gukora.
3. Gukomera cyane no kwihanganira kwambara: Gukomera kwinshi kwa tantalum karbide itanga isahani yifatizo yibanze yo kwambara neza, ikwiranye nibihe bisaba kwihanganira kwambara cyane.
4. Ihungabana ryimiti: Carbide ya Tantalum ifite ituze ryinshi mubintu bitandukanye byimiti, bigatuma isahani yifatizo isize ikora neza mubidukikije bimwe na bimwe byangirika.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
Byongeye kandi, SemiceraIbicuruzwa bisize TaCErekana ubuzima burebure bwa serivisi hamwe nubushyuhe bwo hejuru bwo hejuru ugereranijeSiC.Ibipimo bya laboratoire byagaragaje ko ibyacuIbikoresho bya TaCirashobora guhora ikora ubushyuhe bugera kuri dogere selisiyusi 2300 mugihe kinini. Hano hari ingero zimwe zintangarugero:
