SemiceraTantalum CarbideUbushyuhe bwa MOCVD bwubatswe kubisabwa cyane ubushyuhe bwo hejuru, bushobora kugera ku bushyuhe bugera kuri 2300 ° C. Ubushyuhe butanga ubushyuhe budasanzwe bwumuriro, butanga imikorere ihamye kandi yizewe mubyuma bya organic-organic chimique (MOCVD). Semicera yishingira ibicuruzwa bitwara igihe kirekire kandi byuzuye, bigenewe guhuza inganda zigezweho.
Byakozwe hifashishijwe ibikoresho bya karubide ya tantalum bigezweho, ubwo bushyuhe bwa MOCVD butanga imbaraga zidasanzwe zo kurwanya okiside no kwangirika kwimiti, ndetse no mubushyuhe bwo hejuru. Uku kuramba gutuma bahitamo neza kubikorwa bya semiconductor, epitaxy, nubundi bushyuhe bwo hejuru busaba neza kandi bwizewe.
Ibiranga ubushyuhe bwo hejuru bwa SemiceraTantalum CarbideUbushyuhe bwa MOCVD butanga umusanzu mubikorwa byiza. Ubwubatsi bwabo bukomeye bugabanya kwaguka kwubushyuhe no gutakaza ubushyuhe, bigatuma ubushyuhe bumwe bukwirakwizwa muri substrate. Ibi biganisha ku kuzamura ibicuruzwa no kugabanya ibiciro byo gukora.
Semicera yitangiye gutanga ubushyuhe butujuje gusa ariko burenze ibipimo byinganda. Buri kimweTantalum CarbideMOCVD Heater ifata ingamba zikomeye zo kugenzura ubuziranenge kugirango ikore neza. Hamwe niminsi 30 yo kuyobora, Semicera itanga ubwizerwe n'umuvuduko bisabwa nibikorwa byinganda bigezweho.
Haba muri semiconductor, icyogajuru, cyangwa ibikoresho byubushakashatsi, SemiceraTantalum CarbideUbushyuhe bwa MOCVD ninzira yo gukemura kugirango igere ku bisubizo byiza murwego rwo hejuru. Imikorere yabo idasanzwe kuri 2300 ° C ituma ari ntangarugero kubisabwa aho usanga neza kandi biramba.
hamwe na TaC
Nyuma yo gukoresha TaC (iburyo)
