Ikoranabuhanga rya Wafer

Gutunganya MEMS - Guhuza: Gusaba no gukora mu nganda za Semiconductor, Serivise yihariye ya Semicera

 

Mu nganda ziciriritse na semiconductor, ikoranabuhanga rya MEMS (sisitemu ya micro-electronique) ryabaye imwe mu ikoranabuhanga ryibanze ritera udushya n'ibikoresho bikora neza. Iterambere rya siyansi n’ikoranabuhanga, ikoranabuhanga rya MEMS ryakoreshejwe cyane mu byuma bifata ibyuma bifata ibyuma bifata ibyuma bifata ibyuma bifata ibyuma bifata ibyuma bifata ibyuma bifata ibyuma bifata ibyuma bifata ibyuma bikoresha ibikoresho bya elegitoroniki ndetse n’ibindi bikoresho, kandi bigenda bihinduka igice cy’ikoranabuhanga rigezweho. Muri iyi mirima, inzira yo guhuza (Bonding), nkintambwe yingenzi mugutunganya MEMS, igira uruhare runini mubikorwa no kwizerwa byigikoresho.

 

Guhuza ni tekinoroji ihuza neza ibikoresho bibiri cyangwa byinshi hakoreshejwe umubiri cyangwa imiti. Mubisanzwe, ibice bitandukanye bigomba guhuzwa muguhuza ibikoresho bya MEMS kugirango bigere ku busugire bwimiterere no mubikorwa. Mubikorwa byo gukora ibikoresho bya MEMS, guhuza ntabwo ari inzira yo guhuza gusa, ahubwo bigira ingaruka kuburyo butaziguye kumashanyarazi, imbaraga za mashini, imikorere yamashanyarazi nibindi bice byigikoresho.

 

Muburyo bunoze bwo gutunganya MEMS, tekinoroji yo guhuza ikeneye kwemeza isano iri hagati yibikoresho mugihe twirinze inenge zose zigira ingaruka kumikorere yigikoresho. Kubwibyo, kugenzura neza uburyo bwo guhuza hamwe nibikoresho byujuje ubuziranenge ni ibintu byingenzi byerekana ko ibicuruzwa byanyuma byujuje ubuziranenge bwinganda.

 

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MEMS ihuza porogaramu muruganda rwa semiconductor

Mu nganda za semiconductor, tekinoroji ya MEMS ikoreshwa cyane mugukora ibikoresho bito nka sensor, moteri yihuta, ibyuma byumuvuduko, na giroskopi. Hamwe no kwiyongera kubicuruzwa bito, byinjijwe, kandi byubwenge, ibisabwa nibikorwa bya MEMS nabyo biriyongera. Muri iyi porogaramu, tekinoroji yo guhuza ikoreshwa muguhuza ibikoresho bitandukanye nka wafer ya silicon, ibirahuri, ibyuma, na polymers kugirango bigere kumikorere inoze kandi ihamye.

 

1. Ibyuma byerekana ingufu hamwe na moteri yihuta
Mubice byimodoka, icyogajuru, ibikoresho bya elegitoroniki byabaguzi, nibindi, ibyuma byerekana ingufu za MEMS hamwe na moteri yihuta bikoreshwa cyane muburyo bwo gupima no kugenzura. Uburyo bwo guhuza bukoreshwa muguhuza silicon chip hamwe nibintu bya sensor kugirango tumenye neza kandi neza. Izi sensor zigomba kuba zishobora guhangana n’ibidukikije bikabije, kandi uburyo bwiza bwo guhuza ibintu bushobora kubuza neza ibikoresho gutandukana cyangwa gukora nabi bitewe n’imihindagurikire y’ubushyuhe.

 

2. Micro-optique ibikoresho na MEMS optique
Mu rwego rwitumanaho rya optique nibikoresho bya laser, ibikoresho bya optique ya MEMS hamwe na optique ya optique bigira uruhare runini. Ikoranabuhanga rya Bonding rikoreshwa kugirango ugere ku isano nyayo hagati y’ibikoresho bya MEMS bishingiye kuri silicon nibikoresho nka fibre optique hamwe nindorerwamo kugirango habeho gukora neza no gutuza kwa optique. Cyane cyane mubisabwa hamwe numurongo mwinshi, umurongo mugari hamwe nogukwirakwiza intera ndende, tekinoroji yo guhuza cyane ni ngombwa.

 

3. MEMS gyroscopes hamwe na sensor ya inertial
MEMS gyroscopes hamwe na sensor ya inertial ikoreshwa cyane muburyo bwo kugendagenda neza no guhagarara mubikorwa byo mu rwego rwo hejuru nko gutwara ibinyabiziga byigenga, robotike, hamwe nindege. Ibikorwa bihuza neza cyane birashobora kwemeza kwizerwa ryibikoresho no kwirinda kwangirika kwimikorere cyangwa kunanirwa mugihe cyigihe kirekire cyangwa ibikorwa byinshyi.

 

Ibyingenzi byingenzi bisabwa muburyo bwo guhuza tekinoroji mugutunganya MEMS

Mugutunganya MEMS, ubwiza bwibikorwa byo guhuza bigena neza imikorere, ubuzima nubuzima bwigikoresho. Kugirango tumenye neza ko ibikoresho bya MEMS bishobora gukora byizewe igihe kirekire muburyo butandukanye bwo gukoresha, tekinoroji yo guhuza igomba kuba ifite imikorere yingenzi ikurikira:

1. Umutekano mwinshi
Ibidukikije byinshi byifashishwa mu nganda za semiconductor bifite ubushyuhe bwo hejuru cyane cyane mubijyanye n’imodoka, ikirere, nibindi. Ubushyuhe bwumuriro bwibikoresho bihuza ni ngombwa kandi birashobora kwihanganira ihinduka ryubushyuhe nta kwangirika cyangwa gutsindwa.

 

2. Kurwanya kwambara cyane
Ibikoresho bya MEMS mubisanzwe birimo mikoro-mashini, kandi guterana igihe kirekire no kugenda bishobora gutera kwambara ibice bihuza. Ibikoresho bihuza bigomba kugira imyambarire ihebuje kugirango ihamye kandi ikore neza mugukoresha igihe kirekire.

 

3. Isuku ryinshi

Inganda za semiconductor zifite ibisabwa cyane kubintu byera. Ikintu cyose cyanduye gishobora gutera ibikoresho kunanirwa cyangwa gukora nabi. Kubwibyo, ibikoresho bikoreshwa muburyo bwo guhuza bigomba kuba bifite isuku ryinshi kugirango umenye neza ko igikoresho kitagira ingaruka ku kwanduza hanze mugihe gikora.

 

4. Guhuza neza neza isano
Ibikoresho bya MEMS akenshi bisaba micron-urwego cyangwa na nanometero-urwego rwo gutunganya neza. Igikorwa cyo guhuza kigomba kwemeza neza neza buri cyiciro cyibikoresho kugirango harebwe niba imikorere nigikorwa cyibikoresho bitagize ingaruka.

 

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Guhuza Anodic

Guhuza Anodic:
Byakoreshwa muguhuza wafer ya silicon nikirahure, icyuma nikirahure, semiconductor na alloy, hamwe na semiconductor nikirahure
Guhuza Eutectoid:
Bikoreshwa mubikoresho nka PbSn, AuSn, CuSn, na AuSi

Guhuza kole:
● Koresha kole idasanzwe yo guhuza, ibereye kashe idasanzwe ihuza nka AZ4620 na SU8
Bikoreshwa kuri santimetero 4 na 6

 

Serivise ya Customer Bonding Service

Nka nganda iyoboye inganda zitanga ibisubizo bya MEMS, Semicera yiyemeje guha abakiriya serivisi zisobanutse neza, zihamye cyane za serivisi zihuza ibicuruzwa. Tekinoroji yacu yo guhuza irashobora gukoreshwa cyane muguhuza ibikoresho bitandukanye, harimo silikoni, ikirahure, ibyuma, ububumbyi, nibindi, bitanga ibisubizo bishya kubikorwa byo murwego rwohejuru murwego rwa semiconductor na MEMS.

 

Semicera ifite ibikoresho byumusaruro bigezweho hamwe nitsinda rya tekiniki, kandi irashobora gutanga igisubizo cyihariye cyo guhuza ukurikije ibyo abakiriya bakeneye. Byaba ari imiyoboro yizewe munsi yubushyuhe bwo hejuru hamwe n’umuvuduko ukabije w’ibidukikije, cyangwa guhuza neza ibikoresho bya mikoro, Semicera irashobora kuzuza ibisabwa bitandukanye kugirango igenzure neza ko buri gicuruzwa gishobora kuba cyujuje ubuziranenge bwo hejuru.

 

Serivise yacu yo guhuza ibicuruzwa ntabwo igarukira gusa muburyo busanzwe bwo guhuza, ariko kandi ikubiyemo guhuza ibyuma, guhuza ubushyuhe bwumuriro, guhuza ibiti hamwe nibindi bikorwa, bishobora gutanga ubufasha bwa tekiniki kubikoresho bitandukanye, imiterere nibisabwa. Byongeye kandi, Semicera irashobora kandi guha abakiriya serivisi zuzuye kuva iterambere rya prototype kugeza kumusaruro rusange kugirango buri tekinike isabwa kubakiriya ishobora kugerwaho neza.