Semicera itangizaUmwikorezi wa Cassette, igisubizo gikomeye kubikorwa byizewe kandi neza bya waferi ya semiconductor. Uru ruganda rwakozwe kugirango rwuzuze ibisabwa bikenerwa ninganda ziciriritse, byemeza kurinda nubusugire bwa wafer yawe mugihe cyose cyo gukora.
Ibintu by'ingenzi:
•Ubwubatsi bukomeye:UwitekaUmwikorezi wa Cassetteyubatswe kuva murwego rwohejuru, ibikoresho biramba bihanganira ubukana bwibidukikije bya semiconductor, bitanga uburinzi bwizewe bwo kwirinda kwanduza no kwangirika kwumubiri.
•Guhuza neza:Byagenewe guhuza neza wafer, uyitwara yemeza ko waferi ifashwe neza, bikagabanya ibyago byo kudahuza cyangwa kwangirika mugihe cyo gutwara.
•Gukemura byoroshye:Ergonomique yateguwe kugirango byoroherezwe gukoreshwa, uyitwaye yoroshya uburyo bwo gupakira no gupakurura, kunoza imikorere yumurimo mubidukikije.
•Guhuza:Bihujwe nurwego runini rwa wafer ingano nubwoko, bigatuma bihinduka kubintu bitandukanye bikenerwa na semiconductor.
Inararibonye kurinda ntagereranywa no korohereza hamwe na SemiceraUmwikorezi wa Cassette. Umwikorezi wacu yashizweho kugirango yuzuze ibipimo bihanitse byo gukora semiconductor, byemeza ko wafer yawe iguma imeze neza kuva itangiye kugeza irangiye. Izere Semicera gutanga ubuziranenge no kwizerwa ukeneye kubikorwa byawe bikomeye.
| Ibintu | Umusaruro | Ubushakashatsi | Dummy |
| Ibipimo bya Crystal | |||
| Polytype | 4H | ||
| Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
| Ibipimo by'amashanyarazi | |||
| Dopant | Ubwoko bwa Azote | ||
| Kurwanya | 0.015-0.025ohm · cm | ||
| Ibipimo bya mashini | |||
| Diameter | 150.0 ± 0.2mm | ||
| Umubyimba | 350 ± 25 mm | ||
| Icyerekezo cyibanze | [1-100] ± 5 ° | ||
| Uburebure bwibanze | 47.5 ± 1.5mm | ||
| Igice cya kabiri | Nta na kimwe | ||
| TTV | ≤5 mm | ≤10 mm | ≤15 mm |
| LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
| Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
| Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
| Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Imiterere | |||
| Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
| Umwanda | ≤5E10atoms / cm2 | NA | |
| BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
| TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
| Ubwiza bw'imbere | |||
| Imbere | Si | ||
| Kurangiza | Si-face CMP | ||
| Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
| Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
| Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
| Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
| Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
| Ikimenyetso cya laser imbere | Nta na kimwe | ||
| Inyuma Yinyuma | |||
| Kurangiza | C-isura CMP | ||
| Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
| Inenge zinyuma (chips / indents) | Nta na kimwe | ||
| Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
| Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
| Impande | |||
| Impande | Chamfer | ||
| Gupakira | |||
| Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
| * Inyandiko ： "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. | |||
