Semiceraishema ryerekana aho rigezeGaN Epitaxyserivisi, zagenewe guhuza ibikenerwa bigenda byiyongera byinganda ziciriritse. Nitride ya Gallium (GaN) ni ibikoresho bizwiho imiterere yihariye, kandi inzira yo gukura kwa epitaxial yemeza ko izo nyungu ziboneka neza mubikoresho byawe.
Imikorere-ya GaN Semicerakabuhariwe mu gukora umusaruro wo mu rwego rwo hejuruGaN Epitaxyibice, bitanga ibintu bitagereranywa byera nuburinganire bwuburinganire. Izi nzego ningirakamaro kubikorwa bitandukanye, kuva amashanyarazi ya elegitoronike kugeza kuri optoelectronics, aho imikorere isumba iyindi no kwizerwa ari ngombwa. Tekinike yacu yo gukura neza yemeza ko buri cyiciro cya GaN cyujuje ubuziranenge busabwa kubikoresho bigezweho.
Gukoresha nezaUwitekaGaN Epitaxyzitangwa na Semicera zakozwe muburyo bwihariye kugirango zongere imikorere yibikoresho bya elegitoroniki. Mugutanga inenge nke, zifite isuku nyinshi ya GaN, dushoboza ibikoresho gukora kumurongo mwinshi na voltage, hamwe no gutakaza ingufu. Uku gutezimbere ni urufunguzo rwibikorwa nka transistor yo hejuru ya elegitoronike (HEMTs) hamwe na diode itanga urumuri (LEDs), aho gukora ari byo byingenzi.
Porogaramu zitandukanye zirashoboka Semicera'sGaN Epitaxyni byinshi, byita kumurongo mugari winganda nibisabwa. Waba utezimbere imbaraga zongera imbaraga, ibice bya RF, cyangwa diode ya laser, ibice byacu bya GaN bitanga umusingi ukenewe kubikorwa-byo hejuru, byizewe. Inzira yacu irashobora guhuzwa kugirango ihuze ibisabwa byihariye, kwemeza ko ibicuruzwa byawe bigera kubisubizo byiza.
Kwiyemeza ubuziranengeUbwiza nifatizo ryaSemicera'Kuri KuriGaN Epitaxy. Dukoresha iterambere ryiterambere rya epitaxial hamwe ningamba zikomeye zo kugenzura ubuziranenge kugirango tubyare ibice bya GaN byerekana uburinganire buhebuje, ubucucike buke, nibintu byiza birenze. Uku kwiyemeza ubuziranenge byemeza ko ibikoresho byawe bitujuje gusa ahubwo birenze ibipimo byinganda.
Ubuhanga bwo Gukura Udushya Semicerani ku isonga mu guhanga udushya mu rwego rwaGaN Epitaxy. Ikipe yacu idahwema gushakisha uburyo nubuhanga bushya bwo kunoza iterambere, gutanga ibice bya GaN hamwe n’amashanyarazi yongerewe imbaraga. Udushya dusobanura mubikoresho bikora neza, bishoboye guhuza ibyifuzo byigihe kizaza.
Igisubizo cyihariye kubikorwa byaweKumenya ko buri mushinga ufite ibisabwa byihariye,Semiceraitanga ibicuruzwaGaN Epitaxyibisubizo. Waba ukeneye umwirondoro wihariye wa doping, uburebure bwurwego, cyangwa ubuso burangiye, dukorana cyane nawe kugirango dutezimbere inzira ijyanye nibyo ukeneye. Intego yacu nukuguha ibice bya GaN byakozwe neza kugirango bishyigikire imikorere yigikoresho cyawe kandi cyizewe.
Ibintu | Umusaruro | Ubushakashatsi | Dummy |
Ibipimo bya Crystal | |||
Polytype | 4H | ||
Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
Ibipimo by'amashanyarazi | |||
Dopant | Ubwoko bwa Azote | ||
Kurwanya | 0.015-0.025ohm · cm | ||
Ibipimo bya mashini | |||
Diameter | 150.0 ± 0.2mm | ||
Umubyimba | 350 ± 25 mm | ||
Icyerekezo cyibanze | [1-100] ± 5 ° | ||
Uburebure bwibanze | 47.5 ± 1.5mm | ||
Igice cya kabiri | Nta na kimwe | ||
TTV | ≤5 mm | ≤10 mm | ≤15 mm |
LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
Imiterere | |||
Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
Umwanda | ≤5E10atoms / cm2 | NA | |
BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
Ubwiza bw'imbere | |||
Imbere | Si | ||
Kurangiza | Si-face CMP | ||
Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
Ikimenyetso cya laser imbere | Nta na kimwe | ||
Inyuma Yinyuma | |||
Kurangiza | C-isura CMP | ||
Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
Inenge zinyuma (chips / indents) | Nta na kimwe | ||
Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
Impande | |||
Impande | Chamfer | ||
Gupakira | |||
Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. |