GaN Epitaxy

Ibisobanuro bigufi:

GaN Epitaxy ni ibuye rikomeza imfuruka mu gukora ibikoresho byifashishwa bya semiconductor ikora cyane, bitanga imikorere idasanzwe, ituze ryumuriro, kandi byizewe. Semicera's GaN Epitaxy ibisubizo byateguwe kugirango byuzuze ibisabwa bigezweho, byemeza ubuziranenge kandi buhoraho muri buri cyiciro.


Ibicuruzwa birambuye

Ibicuruzwa

Semiceraishema ryerekana aho rigezeGaN Epitaxyserivisi, zagenewe guhuza ibikenerwa bigenda byiyongera byinganda ziciriritse. Nitride ya Gallium (GaN) ni ibikoresho bizwiho imiterere yihariye, kandi inzira yo gukura kwa epitaxial yemeza ko izo nyungu ziboneka neza mubikoresho byawe.

Imikorere-ya GaN Semicerakabuhariwe mu gukora umusaruro wo mu rwego rwo hejuruGaN Epitaxyibice, bitanga ibintu bitagereranywa byera nuburinganire bwuburinganire. Izi nzego ningirakamaro kubikorwa bitandukanye, kuva amashanyarazi ya elegitoronike kugeza kuri optoelectronics, aho imikorere isumba iyindi no kwizerwa ari ngombwa. Tekinike yacu yo gukura neza yemeza ko buri cyiciro cya GaN cyujuje ubuziranenge busabwa kubikoresho bigezweho.

Gukoresha nezaUwitekaGaN Epitaxyzitangwa na Semicera zakozwe muburyo bwihariye kugirango zongere imikorere yibikoresho bya elegitoroniki. Mugutanga inenge nke, zifite isuku nyinshi ya GaN, dushoboza ibikoresho gukora kumurongo mwinshi na voltage, hamwe no gutakaza ingufu. Uku gutezimbere ni urufunguzo rwibikorwa nka transistor yo hejuru ya elegitoronike (HEMTs) hamwe na diode itanga urumuri (LEDs), aho gukora ari byo byingenzi.

Porogaramu zitandukanye zirashoboka Semicera'sGaN Epitaxyni byinshi, byita kumurongo mugari winganda nibisabwa. Waba utezimbere imbaraga zongera imbaraga, ibice bya RF, cyangwa diode ya laser, ibice byacu bya GaN bitanga umusingi ukenewe kubikorwa-byo hejuru, byizewe. Inzira yacu irashobora guhuzwa kugirango ihuze ibisabwa byihariye, kwemeza ko ibicuruzwa byawe bigera kubisubizo byiza.

Kwiyemeza ubuziranengeUbwiza nifatizo ryaSemicera'Kuri KuriGaN Epitaxy. Dukoresha iterambere ryiterambere rya epitaxial hamwe ningamba zikomeye zo kugenzura ubuziranenge kugirango tubyare ibice bya GaN byerekana uburinganire buhebuje, ubucucike buke, nibintu byiza birenze. Uku kwiyemeza ubuziranenge byemeza ko ibikoresho byawe bitujuje gusa ahubwo birenze ibipimo byinganda.

Ubuhanga bwo Gukura Udushya Semicerani ku isonga mu guhanga udushya mu rwego rwaGaN Epitaxy. Ikipe yacu idahwema gushakisha uburyo nubuhanga bushya bwo kunoza iterambere, gutanga ibice bya GaN hamwe n’amashanyarazi yongerewe imbaraga. Udushya dusobanura mubikoresho bikora neza, bishoboye guhuza ibyifuzo byigihe kizaza.

Igisubizo cyihariye kubikorwa byaweKumenya ko buri mushinga ufite ibisabwa byihariye,Semiceraitanga ibicuruzwaGaN Epitaxyibisubizo. Waba ukeneye umwirondoro wihariye wa doping, uburebure bwurwego, cyangwa ubuso burangiye, dukorana cyane nawe kugirango dutezimbere inzira ijyanye nibyo ukeneye. Intego yacu nukuguha ibice bya GaN byakozwe neza kugirango bishyigikire imikorere yigikoresho cyawe kandi cyizewe.

Ibintu

Umusaruro

Ubushakashatsi

Dummy

Ibipimo bya Crystal

Polytype

4H

Ikosa ryerekana icyerekezo

<11-20> 4 ± 0.15 °

Ibipimo by'amashanyarazi

Dopant

Ubwoko bwa Azote

Kurwanya

0.015-0.025ohm · cm

Ibipimo bya mashini

Diameter

150.0 ± 0.2mm

Umubyimba

350 ± 25 mm

Icyerekezo cyibanze

[1-100] ± 5 °

Uburebure bwibanze

47.5 ± 1.5mm

Igice cya kabiri

Nta na kimwe

TTV

≤5 mm

≤10 mm

≤15 mm

LTV

≤3 μm (5mm * 5mm)

≤5 μm (5mm * 5mm)

≤10 μ m (5mm * 5mm)

Umuheto

-15 mm ~ 15 mm

-35μm ~ 35μm

-45μm ~ 45μm

Intambara

≤35 mm

≤45 mm

≤55 mm

Imbere (Si-face) ubukana (AFM)

Ra≤0.2nm (5μm * 5μm)

Imiterere

Ubucucike bwa Micropipe

<1 ea / cm2

<10 ea / cm2

<15 ea / cm2

Umwanda

≤5E10atoms / cm2

NA

BPD

≤1500 ea / cm2

0003000 ea / cm2

NA

TSD

≤500 ea / cm2

0001000 ea / cm2

NA

Ubwiza bw'imbere

Imbere

Si

Kurangiza

Si-face CMP

Ibice

≤60ea / wafer (ubunini≥0.3μm)

NA

Igishushanyo

≤5ea / mm. Uburebure bwuzuye ≤Ibipimo

Uburebure bwuzuye≤2 * Diameter

NA

Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza

Nta na kimwe

NA

Imipira yimpande / ibyerekana / kuvunika / isahani

Nta na kimwe

Agace ka polytype

Nta na kimwe

Agace kegeranye ≤20%

Agace kegeranye ≤30%

Ikimenyetso cya laser imbere

Nta na kimwe

Inyuma Yinyuma

Kurangiza

C-isura CMP

Igishushanyo

≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter

NA

Inenge zinyuma (chips / indents)

Nta na kimwe

Inyuma yinyuma

Ra≤0.2nm (5μm * 5μm)

Ikimenyetso cya laser inyuma

Mm 1 (uhereye hejuru)

Impande

Impande

Chamfer

Gupakira

Gupakira

Epi-yiteguye hamwe no gupakira vacuum

Gupakira cassette nyinshi

* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD.

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SiC wafers

  • Mbere:
  • Ibikurikira: