Imbuto yo Gutegura Imbuto muri SiC Gukura kwa Crystal imwe (Igice cya 2)

2. Inzira yubushakashatsi

2.1 Gukiza Firime Yifata
Byagaragaye ko gukora firime ya karubone cyangwa guhuza impapuro za grafiteSiC wafersyometseho ibifatika byatumye habaho ibibazo byinshi:

1. Mugihe cya vacuum, firime ifata kuriSiC wafersyateje imbere isura nini bitewe no kurekura ikirere gikomeye, bikavamo ubwinshi bwubutaka. Ibi byabujije ibice bifatanye guhuza neza nyuma ya karubone.

2. Mugihe cyo guhuza ,.waferbigomba gushyirwa kumpapuro zishushanyije. Niba guhinduranya bibaye, igitutu kitaringaniye kirashobora kugabanya uburinganire bufatika, bigira ingaruka mbi kumubano mwiza.

3. Mubikorwa bya vacuum, irekurwa ryumwuka uva kumurongo wifatanije byateje gukuramo no gukora imyanda myinshi muri firime ifata, bikaviramo ubusembwa. Kugira ngo ukemure ibyo bibazo, mbere yo kumisha ibifatika kuriwaferguhuza ubuso ukoresheje isahani ishyushye nyuma yo kuzunguruka birasabwa.

2.2 Uburyo bwa Carbone
Inzira yo gukora firime ya karubone kuriUrubuto rwa SiCno kuyihambira ku mpapuro za grafite bisaba karuboni ya layer yometse ku bushyuhe bwihariye kugirango ihuze neza. Carboneisation ituzuye ya adhesifike irashobora gutuma ibora mugihe cyo gukura, ikarekura umwanda ugira ingaruka kumikurire ya kristu. Kubwibyo, kwemeza karubone yuzuye ya afashe yifatizo ningirakamaro kugirango uhuze cyane. Ubu bushakashatsi busuzuma ingaruka z'ubushyuhe kuri karuboni ifatika. Igice kimwe cyabafotora cyakoreshejwe kuriwaferhejuru hanyuma ugashyirwa mu itanura rya tube munsi ya vacuum (<10 Pa). Ubushyuhe bwazamutse kugirango bugere ku rwego (400 ℃, 500 ℃, na 600 ℃) kandi bikomeza amasaha 3-5 kugirango ugere kuri karubone.

Ubushakashatsi bwerekanye:

Kuri 400 ℃, nyuma yamasaha 3, firime ifata ntabwo karubone kandi yagaragaye itukura yijimye; nta mpinduka nini yagaragaye nyuma yamasaha 4.
Kuri 500 ℃, nyuma yamasaha 3, firime yahindutse umukara ariko ikomeza kohereza urumuri; nta gihinduka gikomeye nyuma yamasaha 4.
Kuri 600 ℃, nyuma yamasaha 3, firime yahindutse umukara nta mucyo, byerekana karubone yuzuye.
Rero, ubushyuhe bukwiye bwo guhuza bugomba kuba ≥600 ℃.

2.3
Uburinganire bwa firime ifata ni ikimenyetso cyingenzi cyo gusuzuma uburyo bwo gufatira hamwe no kwemeza urwego rumwe. Iki gice cyerekana uburyo bwiza bwo kuzunguruka hamwe nigihe cyo gutwikira kubyerekeranye na firime zitandukanye. Uburinganire
u yubunini bwa firime isobanurwa nkigipimo cyubunini bwa firime ntoya Lmin nubunini bwa firime ntarengwa Lmax hejuru yingirakamaro. Ingingo eshanu kuri wafer zatoranijwe kugirango bapime ubunini bwa firime, kandi barabaze. Igishushanyo cya 4 cyerekana ingingo zapimwe.

Kugirango ubucucike buri hagati ya SiC wafer hamwe nibice bya grafite, uburebure bwa firime yifata ni 1-5 µm. Ubunini bwa firime ya 2 µm bwatoranijwe, bukoreshwa muburyo bwo gutegura firime ya karubone hamwe na wafer / grafite impapuro zihuza. Ibyiza bya spin-coating ibipimo bya karubone ni 15 s kuri 2500 r / min, naho kubihuza, 15 s kuri 2000 r / min.

2.4 Uburyo bwo guhuza
Mugihe cyo guhuza wafer ya SiC kurupapuro rwa grafite / grafite, ni ngombwa kurandura burundu imyuka ya gaze na gaze kama ikomoka mugihe cya karuboni iva murwego. Kurandura gaze ituzuye bivamo ubusa, biganisha kumurongo udahuza. Umwuka na gaze kama birashobora kwimurwa hakoreshejwe pompe yamavuta ya mashini. Mu ikubitiro, imikorere idahwitse ya pompe yubukanishi ituma icyumba cya vacuum kigera aho kigarukira, bigatuma umwuka wuzuye uva murwego ruhuza. Ubushyuhe bwihuse burashobora gukumira kurandura gaze mugihe mugihe cya karubone yubushyuhe bwo hejuru, bigatuma habaho icyuho murwego rwo guhuza. Ibikoresho bifata byerekana ko bigaragara kuri 1120 ℃, bigahagarara hejuru yubushyuhe.

Umuvuduko wo hanze ukoreshwa mugihe cyo guhuza kugirango wongere ubwinshi bwa firime ifata, byorohereza kwirukana umwuka na gaze kama, bikavamo urwego rwinshi.

Muncamake, inzira yo guhuza umurongo yerekanwe mubishusho 5 yarakozwe. Mumuvuduko wihariye, ubushyuhe buzamurwa hejuru yubushyuhe burenze (~ 120 ℃) ​​kandi bugakomeza kugeza igihe gusohoka birangiye. Noneho, ubushyuhe bwiyongera kubushyuhe bwa karubone, bugumishwa mugihe gikenewe, hagakurikiraho gukonjesha bisanzwe kubushyuhe bwicyumba, kurekura umuvuduko, no gukuraho wafer ihujwe.

Ukurikije igice cya 2.2, firime ifata igomba kuba karubone kuri 600 ℃ mumasaha arenga 3. Kubwibyo, muburyo bwo guhuza umurongo, T2 yashyizwe kuri 600 ℃ na t2 kugeza kumasaha 3. Indangagaciro nziza kubikorwa byo guhuza umurongo, bigenwa binyuze mubushakashatsi bwa orthogonal yiga ingaruka zumuvuduko wo guhuza, icyiciro cya mbere cyo gushyushya t1, nicyiciro cya kabiri cyo gushyushya t2 kubisubizo byububiko, byerekanwe kumeza 2-4.

Ibisubizo byerekanwe:

Ku gipimo cyo guhuza 5 kN, igihe cyo gushyushya cyagize ingaruka nkeya ku guhuza.
Kuri 10 kN, umwanya wubusa murwego rwo guhuza wagabanutse hamwe no gushyushya icyiciro cya mbere.
Kuri 15 kN, kwagura icyiciro cya mbere gushyushya byagabanije cyane icyuho, amaherezo kirabikuraho.
Icyiciro cya kabiri cyo gushyushya igihe cyo guhuza ntabwo cyagaragaye mubizamini bya orthogonal. Gukosora igitutu cyo guhuza kuri 15 kN nigihe cyo gushyushya icyiciro cya mbere kuri 90 min, icyiciro cya kabiri cyo gushyushya 30, 60, na 90 min byose byaviriyemo guhuza ibice bidafite ubusa, byerekana igihe cyo gushyushya icyiciro cya kabiri cyari gifite Ingaruka nke ku guhuza.

Indangagaciro nziza kubikorwa byo guhuza umurongo ni: guhuza igitutu 15 kN, icyiciro cya mbere cyo gushyushya 90 min, ubushyuhe bwicyiciro cya mbere 120 ℃, icyiciro cya kabiri cyo gushyushya 30 min, icyiciro cya kabiri ubushyuhe 600 ℃, nicyiciro cya kabiri cyo gufata umwanya Amasaha 3.