Igisekuru cya gatatu ibikoresho bya semiconductor birimo cyane cyane SiC, GaN, diyama, nibindi, kubera ko ubugari bwacyo bwagutse (Eg) burenze cyangwa bungana na 2.3 volt electronique (eV), izwi kandi nkibikoresho bigari bya semiconductor.Ugereranije n’ibikoresho bya semiconductor yo mu gisekuru cya mbere n’icya kabiri, ibikoresho bya semiconductor yo mu gisekuru cya gatatu bifite ibyiza byo gutwara amashanyarazi menshi, umurima w'amashanyarazi ucika cyane, umuvuduko mwinshi wimuka wa electron hamwe ningufu nyinshi zihuza, zishobora kuzuza ibisabwa bishya byikoranabuhanga rya kijyambere bigezweho ubushyuhe, imbaraga nyinshi, umuvuduko mwinshi, inshuro nyinshi hamwe no kurwanya imirasire nibindi bihe bibi.Ifite ibyifuzo byingenzi byokoreshwa mubijyanye no kurinda igihugu, indege, ikirere, ubushakashatsi bwa peteroli, kubika optique, nibindi, kandi birashobora kugabanya igihombo cyingufu zirenga 50% mubikorwa byinshi byingirakamaro nko gutumanaho mugari, ingufu zizuba, gukora imodoka, itara rya semiconductor, hamwe na gride yubwenge, kandi irashobora kugabanya ingano yibikoresho hejuru ya 75%, ibyo bikaba bifite akamaro kanini mugutezimbere siyanse nubuhanga bwabantu.
Ingingo 项目 | GaN-FS-CU-C50 | GaN-FS-CN-C50 | GaN-FS-C-SI-C50 |
Diameter | 50.8 ± 1 mm | ||
Umubyimba厚度 | 350 ± 25 mm | ||
Icyerekezo | Indege ya C (0001) ihanamye yerekeza kuri M-axis 0.35 ± 0.15 ° | ||
Flat | (1-100) 0 ± 0.5 °, 16 ± 1 mm | ||
Icyiciro cya kabiri | (11-20) 0 ± 3 °, 8 ± 1 mm | ||
Imyitwarire | N-ubwoko | N-ubwoko | Igice cya kabiri |
Kurwanya (300K) | <0.1 Ω · cm | <0.05 Ω · cm | > 106 Ω · cm |
TTV | ≤ 15 mm | ||
BOW | ≤ 20 mm | ||
Ga Isura Ubuso Buke | <0.2 nm (isize); | ||
cyangwa <0.3 nm (kuvura neza no kuvura hejuru ya epitaxy) | |||
N Isura Yubusa | 0.5 ~ 1.5 mm | ||
amahitamo: 1 ~ 3 nm (ubutaka bwiza);<0.2 nm (isize) | |||
Ubucucike | Kuva kuri 1 x 105 kugeza 3 x 106 cm-2 (ubarwa na CL) * | ||
Ubucucike bwa Macro | <2 cm-2 | ||
Agace gakoreshwa | > 90% (inkombe na macro inenge yo guhezwa) | ||
Urashobora guhindurwa ukurikije ibyo umukiriya asabwa, imiterere itandukanye ya silicon, safiro, SiC ishingiye kuri GaN epitaxial urupapuro. |