Carbide ya Silicon (SiC) ibikoresho bya kirisiti imwe ifite ubugari bunini bwa bande (~ Si inshuro 3), ubushyuhe bwinshi bwo hejuru (~ Si inshuro 3.3 cyangwa GaAs inshuro 10), umuvuduko mwinshi wimuka wa electron (~ Si inshuro 2,5), amashanyarazi menshi yameneka umurima (~ Si inshuro 10 cyangwa GaAs inshuro 5) nibindi biranga ibintu byiza.
Ibikoresho bya SiC bifite ibyiza bidasubirwaho mubijyanye nubushyuhe bwo hejuru, umuvuduko mwinshi, inshuro nyinshi, ibikoresho bya elegitoroniki bikoresha ingufu hamwe nibidukikije bikabije nko mu kirere, mu gisirikare, ingufu za kirimbuzi, nibindi, byuzuza inenge yibikoresho gakondo bya semiconductor mubikorwa bifatika Porogaramu, kandi bigenda bihinduka inzira nyamukuru yingufu za semiconductor.
4H-SiC Silicon karbide substrate ibisobanuro
Ingingo 项目 | Ibisobanuro 参数 | |
Polytype | 4H -SiC | 6H- SiC |
Diameter | 2 cm |3 cm |4 cm |6inch | 2 cm |3 cm |4 cm |6inch |
Umubyimba | 330 mm ~ 350 mm | 330 mm ~ 350 mm |
Imyitwarire | N - andika / Igice cya kabiri | N - andika / Igice cya kabiri |
Dopant | N2 (Azote) V (Vanadium) | N2 (Azote) V (Vanadium) |
Icyerekezo | Ku murongo <0001> | Ku murongo <0001> |
Kurwanya | 0.015 ~ 0.03 ohm-cm | 0.02 ~ 0.1 ohm-cm |
Ubucucike bwa Micropipe (MPD) | ≤10 / cm2 ~ ≤1 / cm2 | ≤10 / cm2 ~ ≤1 / cm2 |
TTV | ≤ 15 mm | ≤ 15 mm |
Umuheto / Intambara | ≤25 mm | ≤25 mm |
Ubuso | DSP / SSP | DSP / SSP |
Icyiciro | Umusaruro / Icyiciro cy'ubushakashatsi | Umusaruro / Icyiciro cy'ubushakashatsi |
Urukurikirane rwa Crystal | ABCB | ABCABC |
Ikirangantego | a = 3.076A, c = 10.053A | a = 3.073A, c = 15.117A |
Eg / eV (Band-gap) | 3.27 eV | 3.02 eV |
ε (Umuyoboro uhoraho) | 9.6 | 9.66 |
Ironderero | n0 = 2.719 ne = 2.777 | n0 = 2.707, ne = 2.755 |
6H-SiC Silicon Carbide substrate ibisobanuro
Ingingo 项目 | Ibisobanuro 参数 |
Polytype | 6H-SiC |
Diameter | 4 cm |6inch |
Umubyimba | 350μm ~ 450μm |
Imyitwarire | N - andika / Igice cya kabiri |
Dopant | N2 (Azote) |
Icyerekezo | <0001> kuri 4 ° ± 0.5 ° |
Kurwanya | 0.02 ~ 0.1 ohm-cm |
Ubucucike bwa Micropipe (MPD) | ≤ 10 / cm2 |
TTV | ≤ 15 mm |
Umuheto / Intambara | ≤25 mm |
Ubuso | Si Isura: CMP, Epi-Yiteguye |
Icyiciro | Icyiciro cy'ubushakashatsi |