Semiceraitangiza ubuziranenge bwayoSi Epitaxyserivisi, zagenewe kubahiriza ibipimo nyabyo byinganda ziciriritse. Epitaxial silicon ibice ni ingenzi kubikorwa no kwizerwa byibikoresho bya elegitoroniki, kandi ibisubizo byacu bya Si Epitaxy byemeza ko ibice byawe bigera kumikorere myiza.
Ibyingenzi-Byakuze bya Silicon Semicerayumva ko umusingi wibikoresho-bikora cyane biri mubwiza bwibikoresho byakoreshejwe. IwacuSi Epitaxyinzira igenzurwa neza kugirango itange silicon igizwe nuburinganire budasanzwe hamwe nuburinganire bwa kristu. Izi nzego ningirakamaro kuri porogaramu kuva kuri microelectronics kugeza kubikoresho byamashanyarazi bigezweho, aho guhuzagurika no kwizerwa aribyo byingenzi.
Kunonosora imikorere yimikorereUwitekaSi Epitaxyserivisi zitangwa na Semicera zateguwe kugirango zongere ibikoresho byamashanyarazi yibikoresho byawe. Mugukuza silikoni-isukuye cyane ifite ubucucike buke, turemeza ko ibice byawe bikora neza, hamwe nogutezimbere kwabatwara no kugabanya amashanyarazi. Uku gutezimbere ni ngombwa kugirango ugere ku muvuduko wihuse kandi unoze cyane usabwa n'ikoranabuhanga rigezweho.
Guhinduranya muri Porogaramu Semicera'sSi Epitaxyirakwiriye kumurongo mugari wa porogaramu, harimo kubyara transistoriste ya CMOS, ingufu MOSFETs, hamwe na transiporo ya bipolar. Inzira yacu ihindagurika yemerera kwihindura ukurikije ibisabwa byihariye byumushinga wawe, waba ukeneye ibice byoroheje kubisabwa byihuta cyane cyangwa ibyimbye binini kubikoresho byamashanyarazi.
Ubwiza bwibikoresho byizaUbwiza buri mu mutima wibyo dukora byose muri Semicera. IwacuSi Epitaxyinzira ikoresha ibikoresho nubuhanga bugezweho kugirango tekinike kugirango buri cyiciro cya silicon cyujuje ubuziranenge bwo hejuru bwubuziranenge nuburinganire bwimiterere. Uku kwitondera amakuru arambuye kugabanya kugabanuka kwinenge zishobora kugira ingaruka kumikorere yibikoresho, bikavamo ibintu byizewe kandi biramba.
Kwiyemeza guhanga udushya Semicerayiyemeje kuguma ku isonga rya tekinoroji ya semiconductor. IwacuSi Epitaxyserivisi zigaragaza iyi mihigo, ikubiyemo iterambere rigezweho muburyo bwo gukura epitaxial. Turakomeza kunonosora inzira zacu kugirango dutange silicon ibice byujuje ibyifuzo byinganda zigenda zihinduka, turebe ko ibicuruzwa byawe bikomeza guhatanira isoko.
Igisubizo cyihariye kubyo ukeneyeKumva ko buri mushinga wihariye,Semiceraitanga ibicuruzwaSi Epitaxyibisubizo kugirango uhuze ibyo ukeneye byihariye. Waba ukeneye umwirondoro wihariye wa doping, ubunini bwurwego, cyangwa hejuru yubuso, itsinda ryacu rikorana cyane nawe kugirango utange ibicuruzwa byujuje ibisobanuro byawe neza.
Ibintu | Umusaruro | Ubushakashatsi | Dummy |
Ibipimo bya Crystal | |||
Polytype | 4H | ||
Ikosa ryerekana icyerekezo | <11-20> 4 ± 0.15 ° | ||
Ibipimo by'amashanyarazi | |||
Dopant | Ubwoko bwa Azote | ||
Kurwanya | 0.015-0.025ohm · cm | ||
Ibipimo bya mashini | |||
Diameter | 150.0 ± 0.2mm | ||
Umubyimba | 350 ± 25 mm | ||
Icyerekezo cyibanze | [1-100] ± 5 ° | ||
Uburebure bwibanze | 47.5 ± 1.5mm | ||
Igice cya kabiri | Nta na kimwe | ||
TTV | ≤5 mm | ≤10 mm | ≤15 mm |
LTV | ≤3 μm (5mm * 5mm) | ≤5 μm (5mm * 5mm) | ≤10 μ m (5mm * 5mm) |
Umuheto | -15 mm ~ 15 mm | -35μm ~ 35μm | -45μm ~ 45μm |
Intambara | ≤35 mm | ≤45 mm | ≤55 mm |
Imbere (Si-face) ubukana (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
Imiterere | |||
Ubucucike bwa Micropipe | <1 ea / cm2 | <10 ea / cm2 | <15 ea / cm2 |
Umwanda | ≤5E10atoms / cm2 | NA | |
BPD | ≤1500 ea / cm2 | 0003000 ea / cm2 | NA |
TSD | ≤500 ea / cm2 | 0001000 ea / cm2 | NA |
Ubwiza bw'imbere | |||
Imbere | Si | ||
Kurangiza | Si-face CMP | ||
Ibice | ≤60ea / wafer (ubunini≥0.3μm) | NA | |
Igishushanyo | ≤5ea / mm. Uburebure bwuzuye ≤Ibipimo | Uburebure bwuzuye≤2 * Diameter | NA |
Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza | Nta na kimwe | NA | |
Imipira yimpande / ibyerekana / kuvunika / isahani | Nta na kimwe | ||
Agace ka polytype | Nta na kimwe | Agace kegeranye ≤20% | Agace kegeranye ≤30% |
Ikimenyetso cya laser imbere | Nta na kimwe | ||
Inyuma Yinyuma | |||
Kurangiza | C-isura CMP | ||
Igishushanyo | ≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter | NA | |
Inenge zinyuma (chips / indents) | Nta na kimwe | ||
Inyuma yinyuma | Ra≤0.2nm (5μm * 5μm) | ||
Ikimenyetso cya laser inyuma | Mm 1 (uhereye hejuru) | ||
Impande | |||
Impande | Chamfer | ||
Gupakira | |||
Gupakira | Epi-yiteguye hamwe no gupakira vacuum Gupakira cassette nyinshi | ||
* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD. |