Si Epitaxy

Ibisobanuro bigufi:

Si Epitaxy- Kugera kubikorwa byigikoresho cyiza hamwe na Si Epitaxy ya Semicera, utanga ibyiciro bya silicon-byakuze neza kubikoresho bya semiconductor bigezweho.


Ibicuruzwa birambuye

Ibicuruzwa

Semiceraitangiza ubuziranenge bwayoSi Epitaxyserivisi, zagenewe kubahiriza ibipimo nyabyo byinganda ziciriritse. Epitaxial silicon ibice nibyingenzi mubikorwa no kwizerwa byibikoresho bya elegitoroniki, kandi ibisubizo byacu bya Si Epitaxy byemeza ko ibice byawe bigera kumikorere myiza.

Ibyingenzi-Byakuze bya Silicon Semicerayumva ko umusingi wibikoresho-bikora cyane biri mubwiza bwibikoresho byakoreshejwe. IwacuSi Epitaxyinzira igenzurwa neza kugirango itange silicon igizwe nuburinganire budasanzwe hamwe nuburinganire bwa kristu. Izi nzego ningirakamaro kuri porogaramu kuva kuri microelectronics kugeza kubikoresho byamashanyarazi bigezweho, aho guhuzagurika no kwizerwa aribyo byingenzi.

Kunonosora imikorere yimikorereUwitekaSi Epitaxyserivisi zitangwa na Semicera zateguwe kugirango zongere ibikoresho byamashanyarazi yibikoresho byawe. Mugukuza silikoni-isukuye cyane ifite ubucucike buke, turemeza ko ibice byawe bikora neza, hamwe nogutezimbere kwabatwara no kugabanya amashanyarazi. Uku gutezimbere ni ingenzi kugirango ugere ku muvuduko wihuse kandi unoze cyane usabwa n'ikoranabuhanga rigezweho.

Guhinduranya muri Porogaramu Semicera'sSi Epitaxyirakwiriye kumurongo mugari wa porogaramu, harimo kubyara transistors ya CMOS, ingufu MOSFETs, hamwe na transiporo ya bipolar. Inzira yacu ihindagurika yemerera kwihindura ukurikije ibisabwa byihariye byumushinga wawe, waba ukeneye ibice byoroheje kubisabwa byihuta cyane cyangwa ibyimbye binini kubikoresho byamashanyarazi.

Ubwiza bwibikoresho byizaUbwiza buri mu mutima wibyo dukora byose muri Semicera. IwacuSi Epitaxyinzira ikoresha ibikoresho nubuhanga bugezweho kugirango tumenye neza ko buri cyiciro cya silicon cyujuje ubuziranenge bwo hejuru bwubuziranenge nuburinganire bwimiterere. Uku kwitondera amakuru arambuye kugabanya kugabanuka kwinenge zishobora guhindura imikorere yibikoresho, bikavamo ibintu byizewe kandi biramba.

Kwiyemeza guhanga udushya Semicerayiyemeje kuguma ku isonga rya tekinoroji ya semiconductor. IwacuSi Epitaxyserivisi zigaragaza iyi mihigo, ikubiyemo iterambere rigezweho muburyo bwo gukura epitaxial. Turakomeza kunonosora inzira zacu kugirango dutange silikoni yujuje ibyifuzo bikenerwa ninganda, turebe ko ibicuruzwa byawe bikomeza guhatanira isoko.

Igisubizo cyihariye kubyo ukeneyeKumva ko buri mushinga wihariye,Semiceraitanga ibicuruzwaSi Epitaxyibisubizo kugirango uhuze ibyo ukeneye byihariye. Waba ukeneye umwirondoro wihariye wa doping, uburebure bwa layer, cyangwa ubuso burangiye, itsinda ryacu rikorana cyane nawe kugirango utange ibicuruzwa byujuje ibisobanuro byawe neza.

Ibintu

Umusaruro

Ubushakashatsi

Dummy

Ibipimo bya Crystal

Polytype

4H

Ikosa ryerekana icyerekezo

<11-20> 4 ± 0.15 °

Ibipimo by'amashanyarazi

Dopant

Ubwoko bwa Azote

Kurwanya

0.015-0.025ohm · cm

Ibipimo bya mashini

Diameter

150.0 ± 0.2mm

Umubyimba

350 ± 25 mm

Icyerekezo cyibanze

[1-100] ± 5 °

Uburebure bwibanze

47.5 ± 1.5mm

Igice cya kabiri

Nta na kimwe

TTV

≤5 mm

≤10 mm

≤15 mm

LTV

≤3 μm (5mm * 5mm)

≤5 μm (5mm * 5mm)

≤10 μ m (5mm * 5mm)

Umuheto

-15 mm ~ 15 mm

-35μm ~ 35μm

-45μm ~ 45μm

Intambara

≤35 mm

≤45 mm

≤55 mm

Imbere (Si-face) ubukana (AFM)

Ra≤0.2nm (5μm * 5μm)

Imiterere

Ubucucike bwa Micropipe

<1 ea / cm2

<10 ea / cm2

<15 ea / cm2

Umwanda

≤5E10atoms / cm2

NA

BPD

≤1500 ea / cm2

0003000 ea / cm2

NA

TSD

≤500 ea / cm2

0001000 ea / cm2

NA

Ubwiza bw'imbere

Imbere

Si

Kurangiza

Si-face CMP

Ibice

≤60ea / wafer (ubunini≥0.3μm)

NA

Igishushanyo

≤5ea / mm. Uburebure bwuzuye ≤Ibipimo

Uburebure bwuzuye≤2 * Diameter

NA

Igishishwa cya orange / ibyobo / ikizinga / imirongo / ibice / kwanduza

Nta na kimwe

NA

Imipira yimpande / ibyerekana / kuvunika / isahani

Nta na kimwe

Agace ka polytype

Nta na kimwe

Agace kegeranye ≤20%

Agace kegeranye ≤30%

Ikimenyetso cya laser imbere

Nta na kimwe

Inyuma Yinyuma

Kurangiza

C-isura CMP

Igishushanyo

≤5ea / mm, Uburebure bwa Cumulative≤2 * Diameter

NA

Inenge zinyuma (chips / indents)

Nta na kimwe

Inyuma yinyuma

Ra≤0.2nm (5μm * 5μm)

Ikimenyetso cya laser inyuma

Mm 1 (uhereye hejuru)

Impande

Impande

Chamfer

Gupakira

Gupakira

Epi-yiteguye hamwe no gupakira vacuum

Gupakira cassette nyinshi

* Inyandiko : "NA" bivuze ko nta cyifuzo Ibintu bitavuzwe bishobora kwerekeza kuri SEMI-STD.

tekinoroji_1_2_size
SiC wafers

  • Mbere:
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