SiC-Coated Graphite Susceptor na Semicera yakozwe muburyo bwo kuba indashyikirwa mubushyuhe bwo hejuru, hamwe na 1700 ° C. Iyi suseptor yateye imbere ikozwe hifashishijwe grafite-isukuye cyane kandi igashyirwa hamwe na karubide ya silicon (SiC) binyuze muburyo bwuzuye bwa Vapor Deposition (CVD). Iremeza gukoresha igihe kirekire idatezimbere pinholes, bitewe nigitambaro cyayo gikomeye, cyabugenewe kirwanya gukuramo.
Ibintu by'ingenzi:
- Kurwanya Ubushyuhe Bwinshi:Irashobora kwihanganira ubushyuhe bugera kuri 1700 ° C, bigatuma biba byiza bisaba porogaramu ya semiconductor.
- Nta mwobo:Yashizweho kubikoresha byinshi nta gushiraho pinholes, yemeza imikorere ihamye.
- Igikoresho kiramba:Igikoresho cya SiC cyabugenewe kiraramba cyane kandi kirwanya gukuramo, nubwo gikoreshwa igihe kirekire.
- Ibisubizo byihariye:Kuboneka mubunini butandukanye nibisobanuro byujuje ibyifuzo byabakiriya.
- Gutanga Byihuse:Hamwe niminsi 30 yo kuyobora, Semicera iremeza gutanga mugihe kugirango ibikorwa byawe bigende neza.
- Ikiguzi-Cyiza:Ibiciro birushanwe bitabangamiye ubuziranenge.
Porogaramu:
- Gukora Semiconductor:Nibyiza byo gukoreshwa muri epitaxy, CVD, nubundi buryo bwo hejuru bwubushyuhe.
- LED Umusaruro:Iremeza ubushyuhe bumwe hamwe nubuziranenge bwo hejuru, kugabanya igipimo cy inenge.
- Amashanyarazi:Kuzamura imikorere no kwizerwa byibikoresho-bikomeye.
Kuki Hitamo Semicera:
Semicera yiyemeje gutanga ibisubizo byiza-byiza bya semiconductor ibisubizo. Ibicuruzwa byacu bya SiC bifatanyirijwe hamwe byashizweho kugirango byuzuze ibipimo bihanitse byo kuramba no gukora, byemeza ibisubizo byiza kubushyuhe bwawe bwo hejuru
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