Ibisobanuro
Turakomeza kwihanganira hafi mugihe dushyira mu bikorwaSiC, ukoresheje imashini ihanitse cyane kugirango umenye neza umwirondoro wa susceptor. Dutanga kandi ibikoresho bifite ibikoresho byiza byo kurwanya amashanyarazi kugirango bikoreshwe muri sisitemu ishyushye. Ibice byose byarangiye bizana ubuziranenge hamwe nicyemezo cyo kubahiriza.
Isosiyete yacu iratangaSiCserivisi zitunganijwe nuburyo bwa CVD hejuru ya grafite, ceramique nibindi bikoresho, kugirango imyuka idasanzwe irimo karubone na silikoni ikora ubushyuhe bwinshi kugirango ibone molekile nziza ya SiC, molekile zashyizwe hejuru yibikoresho bisize, bikora urwego rukingira SIC. SIC yashizweho ihujwe cyane na base ya grafite, itanga igishushanyo cyihariye cya grafite, bityo bigatuma ubuso bwa grafite bwuzuzanya, Ubusa butagira ubukana, ubushyuhe bwo hejuru, kurwanya ruswa no kurwanya okiside.
Inzira ya CVD itanga ubuziranenge bukabije hamwe nubucucike bwa theoretical ofSiCnta bwoba. Ikirenzeho, nka karibide ya silicon irakomeye cyane, irashobora guhanagurwa hejuru yindorerwamo.CVD silicon karbide (SiC)Yatanze ibyiza byinshi harimo ultra-high isuku yubuso no kwambara cyane. Nkuko ibicuruzwa bitwikiriye bifite imikorere ikomeye mumwanya mwinshi hamwe nubushyuhe bwo hejuru, nibyiza kubisabwa mu nganda ziciriritse ndetse n’ibindi bidukikije bifite isuku. Dutanga kandi ibicuruzwa bya pyrolytike (PG).
Ibyingenzi
1. Kurwanya ubushyuhe bukabije bwa okiside:
kurwanya okiside biracyari byiza cyane mugihe ubushyuhe buri hejuru ya 1600 C.
2. Isuku ryinshi: bikozwe nubumara bwa chimique munsi yubushyuhe bwo hejuru bwa chlorine.
3. Kurwanya isuri: gukomera kwinshi, hejuru yuzuye, ibice byiza.
4. Kurwanya ruswa: aside, alkali, umunyu na reagent.
Ibyingenzi byingenzi bya CVD-SIC
SiC-CVD | ||
Ubucucike | (g / cc) | 3.21 |
Imbaraga zoroshye | (Mpa) | 470 |
Kwiyongera k'ubushyuhe | (10-6 / K) | 4 |
Amashanyarazi | (W / mK) | 300 |
Gusaba
CVD silicon carbide coating yakoreshejwe mubikorwa byinganda zisanzwe, nka tray ya MOCVD, RTP hamwe na chambre ya oxyde kuva nitride ya silicon ifite imbaraga zo guhangana nubushyuhe bukabije kandi irashobora kwihanganira plasma yingufu nyinshi.
-Silicon karbide ikoreshwa cyane muri semiconductor no gutwikira.
Gusaba
Ubushobozi bwo gutanga:
10000 Igice / Ibice buri kwezi
Gupakira & Gutanga:
Gupakira: Bisanzwe & Gupakira bikomeye
Umufuka wuzuye + Agasanduku + Ikarito + Pallet
Icyambu:
Ningbo / Shenzhen / Shanghai
Igihe cyo kuyobora:
Umubare (Ibice) | 1 - 1000 | > 1000 |
Est. Igihe (iminsi) | 30 | Kuganira |