Silicon Carbide Disiki ya MOCVD

UwitekaSilicon Carbide Disckuri MOCVD kuva muri semicera, igisubizo-cyiza cyane cyagenewe gukora neza muburyo bwo gukura epitaxial. Semicera Silicon Carbide Disc itanga ubushyuhe budasanzwe nubushuhe, bigatuma iba ikintu cyingenzi mubikorwa bya Si Epitaxy na SiC Epitaxy. Yashizweho kugirango ihangane nubushyuhe bwo hejuru hamwe nibisabwa byimikorere ya MOCVD, iyi disiki itanga imikorere yizewe no kuramba.

Disiki yacu ya Silicon Carbide irahujwe nurwego runini rwa MOCVD, harimoMOCVDsisitemu, kandi ishyigikira inzira ziterambere nka GaN kuri SiC Epitaxy. Ihuza kandi neza na PSS Etching Carrier, ICP Etching Carrier, hamwe na sisitemu ya RTP, ikazamura neza nubwiza bwibicuruzwa byawe. Yaba ikoreshwa mubikorwa bya Monocrystalline Silicon cyangwa LED Epitaxial Susceptor ikoreshwa, iyi disiki itanga ibisubizo bidasanzwe.

Byongeye kandi, Semicera ya Silicon Carbide Disc ihuza imiterere itandukanye, harimo Pancake Susceptor na Barrel Susceptor yashizeho, itanga ibintu byoroshye mubikorwa bitandukanye byo gukora. Kwinjizamo ibice bya Photovoltaque bikomeza kwagura no gukoresha inganda zikomoka ku mirasire y'izuba, bigatuma iba ibintu byinshi kandi byingirakamaro kuri kijyambereepitaxialgukura no gukora igice cya kabiri.