Impeta ikomeye ya SiC

Igikoresho gikomeye cya SiC Icyerekezo Cyerekana Ishusho

Ibisobanuro bigufi:

Impeta ya SiC Etch ya Semicera yagenewe gukora cyane-semiconductor etching ya progaramu hamwe nigihe kirekire kandi cyuzuye. Yakozwe muri karbide ya silicon-isukuye cyane (SiC), iyi mpeta ya etch iruta cyane mu gutera plasma, kumisha byumye, no gutunganya wafer. Ibikorwa bya Semicera byateye imbere byerekana neza ko iyi mpeta itanga imbaraga zo guhangana n’imyuka ndetse no mu bidukikije bikenerwa cyane. Dutegereje kuzaba umufatanyabikorwa wawe w'igihe kirekire mu Bushinwa.

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Ibicuruzwa birambuye

Ibicuruzwa

Impeta ya Solid SiC iva muri Semicera nigice cyambere cyagenewe guhuza ibyifuzo byinganda zikora neza. Yakozwe mu kwera cyaneSilicon Carbide (SiC), iyi mpeta yibanze nibyiza kumurongo mugari wa porogaramu mu nganda ziciriritse, cyane cyane muriCVD SiC, plasma yangiza, naICPRIE (Plasma Yubatswe Ihinduranya Ion Etching). Azwiho kwihanganira imyambarire idasanzwe, guhagarara neza k'ubushyuhe, no kweza, itanga imikorere irambye mubihe byinshi.

Mu gice cya kabiriwafergutunganya, Impeta ya Solid SiC ningirakamaro mugukomeza gutobora neza mugihe cyumye cyumye na wafer. Impeta yibanze ya SiC ifasha mukwibanda kuri plasma mugihe cyibikorwa nkibikorwa byimashini ikora plasma, bigatuma biba ngombwa mugutobora wafer ya silicon. Ibikoresho bikomeye bya SiC bitanga kurwanya ntagereranywa kurwanya isuri, bikaramba kuramba kwibikoresho byawe no kugabanya igihe cyateganijwe, kikaba ari ngombwa mugukomeza kwinjiza byinshi mubihimbano bya semiconductor.

Impeta ya Solid SiC iva muri Semicera yakozwe kugirango ihangane nubushyuhe bukabije n’imiti ikaze ikunze kugaragara mu nganda zikoresha imashanyarazi. Byakozwe muburyo bwihariye kugirango bikoreshwe mubikorwa-bisobanutse neza nkaCVD SiC, aho ubuziranenge no kuramba aribyo byingenzi. Hamwe no guhangana cyane nubushyuhe bwumuriro, iki gicuruzwa cyerekana imikorere ihamye kandi ihamye mubihe bikaze, harimo no guhura nubushyuhe bwinshi mugihewaferinzira.

Muri semiconductor progaramu, aho ibisobanuro no kwizerwa ari urufunguzo, Impeta ya Solid SiC ifite uruhare runini mukuzamura imikorere rusange yimikorere. Igishushanyo cyacyo gikomeye, gikora neza cyane bituma ihitamo neza inganda zisaba ibice bifite isuku nyinshi ikora mubihe bikabije. Byakoreshejwe muriImpeta ya CVDporogaramu cyangwa nkigice cyo gutunganya plasma, Semicera's Solid SiC Focus Ring ifasha guhindura imikorere yibikoresho byawe, itanga kuramba no kwizerwa mubikorwa byawe bikenewe.

Ibintu by'ingenzi:

• Kurwanya kwambara birenze urugero no guhagarara neza
• Ubuziranenge-bukomeye Solid SiC ibikoresho byo kuramba
• Ibyiza byo gutera plasma, ICP RIE, hamwe no gukama byumye
• Byuzuye muburyo bwa wafer, cyane cyane mubikorwa bya CVD SiC
• Imikorere yizewe mubidukikije bikabije nubushyuhe bwo hejuru
• Iremeza neza kandi neza mugutobora wafer ya silicon

Porogaramu:

• CVD SiC itunganya mubikorwa bya semiconductor
• Plasma etching na sisitemu ya ICP RIE
• Kuma byumye hamwe na wafer yogukora
• Gutera no gushira mumashini ya plasma
• Ibice bisobanutse kumpeta ya wafer nimpeta ya CVD SiC