Ibisobanuro
Isosiyete yacu iratangaSiCserivisi zitunganyirizwa hejuru ya grafite, ceramique nibindi bikoresho hakoreshejwe uburyo bwa CVD, kugirango imyuka idasanzwe irimo karubone na silikoni ishobora kwitwara mubushyuhe bwinshi kugirango ibone molekile nziza ya Sic, ishobora gushyirwa hejuru yibikoresho bisize kugirango bibe aKurinda SiCkuri epitaxy barrel ubwoko bwa hy pnotic.
Ibyingenzi
1. Kurwanya ubushyuhe bukabije bwa okiside:
kurwanya okiside biracyari byiza cyane mugihe ubushyuhe buri hejuru ya 1600 C.
2. Isuku ryinshi: bikozwe nubumara bwa chimique munsi yubushyuhe bwo hejuru bwa chlorine.
3. Kurwanya isuri: gukomera kwinshi, hejuru yuzuye, ibice byiza.
4. Kurwanya ruswa: aside, alkali, umunyu hamwe na reagent.
Ibyingenzi byingenzi bya CVD-SIC
| Ibiranga SiC-CVD | ||
| Imiterere ya Crystal | FCC β icyiciro | |
| Ubucucike | g / cm ³ | 3.21 |
| Gukomera | Vickers gukomera | 2500 |
| Ingano y'ibinyampeke | μm | 2 ~ 10 |
| Ubuziranenge bwa Shimi | % | 99.99995 |
| Ubushyuhe | J · kg-1 · K-1 | 640 |
| Ubushyuhe bwo hejuru | ℃ | 2700 |
| Imbaraga zidasanzwe | MPa (RT-amanota 4) | 415 |
| Umusore Modulus | Gpa (4pt yunamye, 1300 ℃) | 430 |
| Kwagura Ubushyuhe (CTE) | 10-6K-1 | 4.5 |
| Amashanyarazi | (W / mK) | 300 |
