Ibisobanuro
Semicera ya SiC itwikiriwe na grafite ya suseptor yakozwe hakoreshejwe sisitemu yo mu rwego rwohejuru ya grafite, ihujwe neza na Silicon Carbide (SiC) ikoresheje uburyo bwa kijyambere bwa Vapor Deposition (CVD). Igishushanyo mbonera gishya kirwanya imbaraga zidasanzwe zo guhangana nubushyuhe bwumuriro no kwangirika kwimiti, byongerera cyane ubuzima bwa SiC yubatswe na grafite susceptor kandi ikanatanga imikorere yizewe mugihe cyo gukora igice cya kabiri.
Ibintu by'ingenzi ：
1. Ubushuhe buhebujeSiC yometse kuri grafite susceptor yerekana ubushyuhe budasanzwe bwumuriro, ningirakamaro mugukwirakwiza neza ubushyuhe mugihe cyo gukora semiconductor. Iyi mikorere igabanya ubushyuhe bwumuriro hejuru ya wafer, igateza imbere ubushyuhe bumwe bukenewe kugirango umuntu agere ku cyifuzo cya semiconductor.
2. Kurwanya Imiti nubushyuhe bukomeyeIpfunyika rya SiC ritanga uburinzi bukomeye bwo kwangirika kwangirika kwimiti no guhungabana kwubushyuhe, bikomeza ubusugire bwikigereranyo cya grafite ndetse no mubidukikije bitunganijwe. Uku kuramba kwongerewe kugabanya kugabanya igihe kandi bikongerera igihe cyo kubaho, bikagira uruhare mukwongera umusaruro no gukoresha neza ibicuruzwa bikora inganda.
3. Guhitamo kubikenewe byihariyeSiC yacu yashushanyije ibishushanyo mbonera birashobora guhuzwa kugirango byuzuze ibisabwa nibyifuzo. Dutanga urutonde rwamahitamo yihariye, harimo ingano yoguhindura no gutandukana mubyerekeranye nuburinganire, kugirango tumenye neza igishushanyo mbonera no gukora neza kubikorwa bitandukanye nibikorwa.
Porogaramu ：
PorogaramuSemicera SiC yambarwa ikoreshwa mubyiciro bitandukanye byo gukora igice cya kabiri, harimo:
1. -GUKORESHA Chip
2.-Umusaruro wa Polisilicon
3. -Imikurire ya sisitemu yo gukura
4. -Silicon na SiC Epitaxy
5. -Ubushuhe bwa Oxideya na Diffusion (TO&D)
Ibisobanuro bya tekiniki ：
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Gutanga umusaruro Ibisobanuro bitandukanye muri hi ...
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Sisitemu yubushyuhe bwa Epitaxy Sisitemu
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Silicon Carbide Yashushanyije Graphite Wafer
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SiC Igikoresho cya Barrel Imiterere ya Barrel Susceptor
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Ifu yuzuye silicon karbide ifu ya semiconducto ...
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Graphite Susceptors hamwe na Silicon Carbide Coatin ...