Silicon Carbide (SiC) Wafer Susceptors ya MOCVD

UwitekaSilicon Carbide (SiC) Wafer Susceptorskuri MOCVD kuva muri semicera yagenewe inzira igezweho ya epitaxial, itanga imikorere isumba iyombiSi EpitaxynaSiC EpitaxyPorogaramu. Uburyo bushya bwa Semicera butuma aba suseptors baramba kandi bakora neza, bitanga ituze nukuri kubikorwa bikomeye byo gukora.

Yashizweho kugirango ashyigikire ibikenewe bikeneweMOCVDsisitemu, ibyo bicuruzwa biranyuranye, bihujwe nabatwara nka PSS Etching Carrier, ICP Etching Carrier, na RTP. Ihinduka ryabo rituma babera inganda zikoranabuhanga rikomeye, harimo n’abo bakoranaLED EpitaxialSusceptor na Monocrystalline Silicon.

Hamwe nibikoresho byinshi, birimo Barrel Susceptor na Pancake Susceptor, aba suseptors ya wafer nabo ni ngombwa mumirenge ya fotovoltaque, ishyigikira inganda za Photovoltaic. Ku bakora inganda za semiconductor, ubushobozi bwo kuyobora GaN kuri gahunda ya SiC Epitaxy ituma aba suseptors bafite agaciro gakomeye kugirango barebe umusaruro mwiza wo hejuru murwego rwinshi rwa porogaramu.