Ubururu / icyatsi LED epitaxy yo muri semicera itanga ibisubizo bigezweho kubikorwa bya LED ikora neza. Yashizweho kugirango ishyigikire iterambere ryiterambere rya epitaxial, tekinoroji ya semicera yubururu / icyatsi LED epitaxy yongerera imbaraga kandi neza mugukora LED yubururu nicyatsi kibisi, ingenzi kubikorwa bitandukanye bya optoelectronic. Ukoresheje uburyo bugezweho bwa Si Epitaxy na SiC Epitaxy, iki gisubizo gitanga ubuziranenge kandi burambye.
Mubikorwa byo gukora, Susceptor ya MOCVD igira uruhare runini, hamwe nibice nka PSS Etching Carrier, ICP Etching Carrier, na RTP Carrier, bitezimbere ibidukikije bikura. Epicexy ya Semicera yubururu / icyatsi LED yashizweho kugirango itange inkunga ihamye ya LED Epitaxial Susceptor, Barrel Susceptor, na Silicon Monocrystalline, itanga umusaruro ushimishije, wujuje ubuziranenge.
Iyi epitaxy inzira ningirakamaro mugukora Photovoltaic Ibice kandi ishyigikira porogaramu nka GaN kuri SiC Epitaxy, kuzamura imikorere ya semiconductor muri rusange. Haba muburyo bwa Pancake Susceptor cyangwa ikoreshwa mubindi bikoresho byateye imbere, semicera yubururu / icyatsi LED epitaxy ibisubizo bitanga imikorere yizewe, ifasha abayikora guhaza ibyifuzo bikenerwa nibikoresho bya LED byujuje ubuziranenge.
Ibyingenzi byingenzi:
1. Kurwanya ubushyuhe bukabije bwa okiside:
kurwanya okiside biracyari byiza cyane mugihe ubushyuhe buri hejuru ya 1600 C.
2. Isuku ryinshi: bikozwe nubumara bwa chimique munsi yubushyuhe bwo hejuru bwa chlorine.
3. Kurwanya isuri: gukomera kwinshi, hejuru yuzuye, ibice byiza.
4. Kurwanya ruswa: aside, alkali, umunyu na reagent.
Ibyingenzi byingenzi byaCVD-SIC
| Ibiranga SiC-CVD | ||
| Imiterere ya Crystal | FCC β icyiciro | |
| Ubucucike | g / cm ³ | 3.21 |
| Gukomera | Vickers gukomera | 2500 |
| Ingano y'ibinyampeke | μm | 2 ~ 10 |
| Ubuziranenge bwa Shimi | % | 99.99995 |
| Ubushyuhe | J · kg-1 · K-1 | 640 |
| Ubushyuhe bwo hejuru | ℃ | 2700 |
| Imbaraga zidasanzwe | MPa (RT-amanota 4) | 415 |
| Umusore Modulus | Gpa (4pt yunamye, 1300 ℃) | 430 |
| Kwagura Ubushyuhe (CTE) | 10-6K-1 | 4.5 |
| Amashanyarazi | (W / mK) | 300 |
